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Desk Sputter Coater - TT-DSR1

Application

TT-DSR1 Desk SEM Coater model is a compact coating system which able to coat noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens. Uniform thin films with fine-grain sizes are formed in a fast cycle time. The produced thin film is suitable for scanning electron microscopy (SEM) analysis.

The Desk Magnetron Sputter Coater (DSR1) is a high productivity tool that delivers consistent and highly repeatable results in the fully automated system. It’s ergonomic design and small footprint of the DSR1 SEM coating system allows easy use of the system.

TT-DSR1, the modular of SEM sample preparation system, configured as a sputter coater and carbon coater (thread) with interchangeable heads in one instrument. It is a Scanning Electron Microscope (SEM) sample preparation system equipped with a rotary pump to achieve vacuum less than 50mTorr which is a suitable   vacuum   range   for   noble   metals   sputter   coating   and evaporation coating.

Features

  • Two-stage, direct drive 4m3/h, rotary vane pump
  • High precision quartz crystal thickness monitor
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Control coating rate to achieve finer grain structures
  • Manual or automatic Timed and Thickness sputtering
  • Easy-to-change specimen stages (rotation stage as standard)

Touch Screen Control

TT-DSR1, the desk sputter coater, is equipped with a 7inch colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Sample Holder

TT-DSR1 can be equipped with different sample stage configurations depending on the user requirements. The sample stages are rotatable with adjustable height and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens.

Technical Specifications

Model

TT-DSR1

Thermocouple Gauge

0.001-1 mbar

Magnetron Sputtering Cathode

2inch single straight magnetron cathode

Micro Controller

For auto programming of process

Display

7inch touch screen monitor (programming, handling, parameters illustration)

Vacuum Chamber

Pyrex cylinder chamber, OD: 170mm, H: 140mm, Thick: 7mm

Target

0.15mm gold

Crystal Thickness Meter head

Quartz crystal retentive

Film Thickness Monitor

Program ability and 1nm precession

Sample Holder

Standard of SEM sample holder (motorized)

Rotary Vane pump

14m3 / hr. 2 Stage oil sealed

Shutter

Electronic shutter

Metering Valve

Fine needle valve

Vent Valve

1/4inch automatic electric

Dimensions

450 × 500 × 370mm (H × W × D)

Shipping Weight

18kg (without vacuum pump) / 34kg (with pump)

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